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Robert Shick
Robert Shick
Global R&D Director, Microelectronics for Pall Corporation (a Danaher Group Company)
Verified email at pall.com - Homepage
Title
Cited by
Cited by
Year
Addition polymerization of norbornene-type monomers using neutral nickel complexes containing fluorinated aryl ligands
DA Barnes, GM Benedikt, BL Goodall, SS Huang, HA Kalamarides, ...
Macromolecules 36 (8), 2623-2632, 2003
1962003
Functionalized polynorbornene dielectric polymers: adhesion and mechanical properties
NR Grove, PA Kohl, SA Bidstrup Allen, S Jayaraman, R Shick
Journal of Polymer Science Part B: Polymer Physics 37 (21), 3003-3010, 1999
1851999
Addition polymerization of norbornene-type monomers. High activity cationic allyl palladium catalysts
J Lipian, RA Mimna, JC Fondran, D Yandulov, RA Shick, BL Goodall, ...
Macromolecules 35 (24), 8969-8977, 2002
1432002
Low k, Porous Methyl Silsesquioxane and Spin‐On‐Glass
AT Kohl, R Mimna, R Shick, L Rhodes, ZL Wang, PA Kohl
Electrochemical and solid-state letters 2 (2), 77, 1998
1341998
Synthesis and nonlinear-optical properties of vinyl-addition poly (norbornene) s
KH Park, RJ Twieg, R Ravikiran, LF Rhodes, RA Shick, D Yankelevich, ...
Macromolecules 37 (14), 5163-5178, 2004
1042004
Air-gaps in 0.3 μm electrical interconnections
PA Kohl, DM Bhusari, M Wedlake, C Case, FP Klemens, J Miner, BC Lee, ...
IEEE Electron Device Letters 21 (12), 557-559, 2000
822000
Adsorption behavior of a silane coupling agent on colloidal silica studied by gel permeation chromatography
N Nishiyama, R Shick, H Ishida
Journal of colloid and interface science 143 (1), 146-156, 1991
791991
Air‐Gaps for Electrical Interconnections
PA Kohl, Q Zhao, K Patel, D Schmidt, SA Bidstrup-Allen, R Shick, ...
Electrochemical and Solid-State Letters 1 (1), 49, 1998
771998
Protecting groups for 193-nm photoresists
RD Allen, R Sooriyakumaran, J Opitz, GM Wallraff, RA Di Pietro, G Breyta, ...
Advances in Resist Technology and Processing XIII 2724, 334-343, 1996
751996
Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
BL Goodall, S Jayaraman, RA Shick, LF Rhodes
US Patent 6,136,499, 2000
742000
Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
LF Rhodes, A Bell, S Jayaraman, JH Lipian, BL Goodall, RA Shick
US Patent 6,232,417, 2001
662001
Crosslinking and decomposition reactions of epoxide functionalized polynorbornene. Part I. FTIR and thermogravimetric analysis
P Chiniwalla, Y Bai, E Elce, R Shick, WC McDougall, SAB Allen, PA Kohl
Journal of applied polymer science 89 (2), 568-577, 2003
642003
Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
BL Goodall, S Jayaraman, RA Shick, LF Rhodes
US Patent 6,790,579, 2004
612004
Addition polymers of polycycloolefins containing silyl functional groups
LH McIntosh III, BL Goodall, RA Shick, S Jayaraman
US Patent 5,912,313, 1999
521999
Fabrication of microchannels using polynorbornene photosensitive sacrificial materials
X Wu, HA Reed, Y Wang, LF Rhodes, E Elce, R Ravikiran, RA Shick, ...
Journal of the Electrochemical Society 150 (9), H205, 2003
482003
Reactive ion etching of 193-nm resist candidates: current platforms and future requirements
TI Wallow, PJ Brock, RA Di Pietro, RD Allen, J Opitz, R Sooriyakumaran, ...
Advances in Resist Technology and Processing XV 3333, 92-101, 1998
471998
Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
BL Goodall, S Jayaraman, RA Shick, LF Rhodes, RD Allen, RA DiPietro, ...
US Patent 6,723,486, 2004
432004
Theoretical development for depth profiling of stratified layers using variable-angle ATR
RA Shick, JL Koenig, H Ishida
Applied spectroscopy 47 (8), 1237-1244, 1993
401993
Photosensitive polynorbornene based dielectric. I. Structure–property relationships
Y Bai, P Chiniwalla, E Elce, RA Shick, J Sperk, SAB Allen, PA Kohl
Journal of applied polymer science 91 (5), 3023-3030, 2004
382004
Optical waveguides and methods for making the same
XM Zhao, R Ravikiran, PS Neal, RA Shick, JE Watson, TM Kafka, D Chum, ...
US Patent 6,677,175, 2004
322004
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